Surface Electric Potential Measurement with a Static Probe
Surface electric potential measurements are widely used in non-destructive inspection and testing of precision surfaces, for example, in the production of semiconductor devices and integrated circuits. Features of the construction and application of devices for measuring the surface electric potenti...
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| Principais autores: | , , , , , , , , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
Belarusian National Technical University
2023-08-01
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| Colecção: | Приборы и методы измерений |
| Assuntos: | |
| Acesso em linha: | https://pimi.bntu.by/jour/article/view/825 |
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