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COMPENSATION OF MEASUREMENT ERRORS WHEN REDUCING LINEAR DIMENSIONS OF THE KELVIN PROBE

The study is based on results of modeling of measurement circuit containing vibrating-plate capacitor using a complex-harmonic analysis technique. Low value of normalized frequency of small-sized scanning Kelvin probe leads to high distortion factor of probe’s measurement signal that in turn leads t...

Ausführliche Beschreibung

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Bibliografische Detailangaben
Hauptverfasser: A. K. Tyavlovsky, A. L. Zharin
Format: Artigo
Sprache:Inglês
Veröffentlicht: Belarusian National Technical University 2015-03-01
Schriftenreihe:Приборы и методы измерений
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Online-Zugang:https://pimi.bntu.by/jour/article/view/36
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