Experimental Validation of Ultra-Precision Nanopositioning System
In this paper, the development of an ultra-precision XY nanopositioning stage is presented. For system structure, the actuator decoupled parallel compliant mechanism is designed to have the same dynamics in both x- and y-direction so that the coupling crosstalk between two axes can be minimized. Thr...
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| Principais autores: | , , , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado: |
IEEE
2021-01-01
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| Series: | IEEE Access |
| Assuntos: | |
| Acceso en liña: | https://ieeexplore.ieee.org/document/9399080/ |
| Tags: |
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