Quasi-Optical Four-Port Acoustic Filters Based on NEMS Coupled Beam Arrays

Theoretical models are presented for quasi-optical four-port acoustic devices based on NEMS-coupled beam arrays. Analogies with coupled mode devices in microwaves, ultrasonics, optics, and electron wave optics are first reviewed, together with coupled beam filters. Power transfer between two mechani...

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Hlavní autor:	Richard Syms
Médium:	Artigo
Jazyk:	Inglês
Vydáno:	MDPI AG 2024-10-01
Edice:	Micromachines
Témata:	MEMS NEMS directional coupler directional coupler filter
On-line přístup:	https://www.mdpi.com/2072-666X/15/10/1257
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