Mechanical Synchronization of MEMS Electrostatically Driven Coupled Beam Filters
Micro-electromechanical systems (MEMS) bandpass filters based on arrays of electrostatically driven coupled beams have been demonstrated at MHz frequencies. High performance follows from the high Q-factor of mechanical resonators, and electrostatic transduction allows tuning, matching and actuation....
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| Huvudupphov: | , |
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| Materialtyp: | Artigo |
| Språk: | Inglês |
| Utgiven: |
MDPI AG
2021-09-01
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| Serie: | Micromachines |
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| Länkar: | https://www.mdpi.com/2072-666X/12/10/1191 |
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