Quantum Kernel Learning for Small Dataset Modeling in Semiconductor Fabrication: Application to Ohmic Contact

Abstract Modeling complex semiconductor fabrication processes such as Ohmic contact formation remains challenging due to high‐dimensional parameter spaces and limited experimental data. While classical machine learning (CML) approaches have been successful in many domains, their performance degrades...

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Váldodahkkit:	Zeheng Wang, Fangzhou Wang, Liang Li, Zirui Wang, Timothy van derLaan, Ross C. C. Leon, Jing‐Kai Huang, Muhammad Usman
Materiálatiipa:	Artigo
Giella:	Inglês
Almmustuhtton:	Wiley 2025-09-01
Ráidu:	Advanced Science
Fáttát:	fabrication quantum kernel quantum machine learning semiconductor device
Liŋkkat:	https://doi.org/10.1002/advs.202506213
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