Quantum Kernel Learning for Small Dataset Modeling in Semiconductor Fabrication: Application to Ohmic Contact
Abstract Modeling complex semiconductor fabrication processes such as Ohmic contact formation remains challenging due to high‐dimensional parameter spaces and limited experimental data. While classical machine learning (CML) approaches have been successful in many domains, their performance degrades...
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| Principais autores: | , , , , , , , |
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| Format: | Artigo |
| Sprog: | Inglês |
| Udgivet: |
Wiley
2025-09-01
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| Serier: | Advanced Science |
| Fag: | |
| Online adgang: | https://doi.org/10.1002/advs.202506213 |
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