Low Power Compact 3D-Constructed AlScN Piezoelectric MEMS Mirrors for Various Scanning Strategies

In this paper, the newly developed 3D-constructed AlScN piezoelectric MEMS mirror is presented. This paper describes the structure and driving mechanism of the proposed mirror device, covering its driving characteristics in both quasi-static and resonant scan modes. Particularly, this paper deals wi...

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Detalhes bibliográficos

Principais autores:	Jeong-Yeon Hwang, Lena Wysocki, Erdem Yarar, Gunnar Wille, Fin Röhr, Jörg Albers, Shanshan Gu-Stoppel
Formato:	Artigo
Idioma:	Inglês
Publicado em:	MDPI AG 2023-09-01
coleção:	Micromachines
Assuntos:	MEMS mirror aluminum scandium nitride (AlScN) piezoelectric actuation quasi-static scan resonant scan
Acesso em linha:	https://www.mdpi.com/2072-666X/14/9/1789
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