Atomic Layer Deposition of Buffer Layers for the Growth of Vertically Aligned Carbon Nanotube Arrays

Abstract Vertically aligned carbon nanotube arrays (VACNTs) show a great potential for various applications, such as thermal interface materials (TIMs). Besides the thermally oxidized SiO2, atomic layer deposition (ALD) was also used to synthesize oxide buffer layers before the deposition of the cat...

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Principais autores:	Hao-Hao Li, Guang-Jie Yuan, Bo Shan, Xiao-Xin Zhang, Hong-Ping Ma, Ying-Zhong Tian, Hong-Liang Lu, Johan Liu
格式:	Artigo
語言:	Inglês
出版:	SpringerOpen 2019-04-01
叢編:	Nanoscale Research Letters
主題:	Atomic layer deposition Vertically aligned carbon nanotube arrays Oxide buffer layers Thermal interface materials
在線閱讀:	http://link.springer.com/article/10.1186/s11671-019-2947-5
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