Comparison of properties of multilayer film sputtered on glass and polypropylene substrates with angular DC magnetron Co-sputtering system

Complex multilayer film structures were fabricated through a custom-built angular DC magnetron co-sputtering system. In this system, separate Cu, Al, and brass (Cu + Zn) targets were mounted on three magnetron guns, working in conjunction with a rotating substrate. This study aimed to compare the pr...

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Bibliografische gegevens

Hoofdauteurs:	Preecha Changyom, Komgrit Leksakul, Dheerawan Boonyawan, Pongsawat Premphet, Norrapon Vichiansan
Formaat:	Artigo
Taal:	Inglês
Gepubliceerd in:	Elsevier 2023-11-01
Reeks:	Heliyon
Onderwerpen:	Magnetron sputtering Angular sputtering Co-sputtering Multilayer sputtering
Online toegang:	http://www.sciencedirect.com/science/article/pii/S2405844023094550
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