CMOS-compatible a-Si metalenses on a 12-inch glass wafer for fingerprint imaging

Metalenses made of artificial sub-wavelength nanostructures have shown the capability of light focusing and imaging with a miniaturized size. Here, we report the demonstration of mass-producible amorphous silicon metalenses on a 12-inch glass wafer via the complementary metal-oxide-semiconductor com...

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Detalhes bibliográficos

Principais autores:	Hu Ting, Zhong Qize, Li Nanxi, Dong Yuan, Xu Zhengji, Fu Yuan Hsing, Li Dongdong, Bliznetsov Vladimir, Zhou Yanyan, Lai Keng Heng, Lin Qunying, Zhu Shiyang, Singh Navab
Formato:	Artigo
Idioma:	Inglês
Publicado em:	Wiley 2020-02-01
coleção:	Nanophotonics
Assuntos:	metasurface glass wafer metalens
Acesso em linha:	https://doi.org/10.1515/nanoph-2019-0470
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