CMOS-compatible a-Si metalenses on a 12-inch glass wafer for fingerprint imaging
Metalenses made of artificial sub-wavelength nanostructures have shown the capability of light focusing and imaging with a miniaturized size. Here, we report the demonstration of mass-producible amorphous silicon metalenses on a 12-inch glass wafer via the complementary metal-oxide-semiconductor com...
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| Principais autores: | , , , , , , , , , , , , |
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| Format: | Artigo |
| Jezik: | Inglês |
| Izdano: |
Wiley
2020-02-01
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| Serija: | Nanophotonics |
| Teme: | |
| Online dostop: | https://doi.org/10.1515/nanoph-2019-0470 |
| Oznake: |
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