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Highly Fast Response of Pd/Ta<sub>2</sub>O<sub>5</sub>/SiC and Pd/Ta<sub>2</sub>O<sub>5</sub>/Si Schottky Diode-Based Hydrogen Sensors

Herein, the fabrication of a novel highly sensitive and fast hydrogen (H<sub>2</sub>) gas sensor, based on the Ta<sub>2</sub>O<sub>5</sub> Schottky diode, is described. First, Ta<sub>2</sub>O<sub>5</sub> thin films are deposited on silicon carbide (SiC) and silicon (Si) substrates via a radio freque...

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Principais autores: Muhammad Hussain, Woonyoung Jeong, Il-Suk Kang, Kyeong-Keun Choi, Syed Hassan Abbas Jaffery, Asif Ali, Tassawar Hussain, Muhammad Ayaz, Sajjad Hussain, Jongwan Jung
Formato: Artigo
Idioma:Inglês
Publicado em: MDPI AG 2021-02-01
coleção:Sensors
Assuntos:
hydron sensor
high temperature
Schottky diode
tantalum oxide
silicon carbide
Acesso em linha:https://www.mdpi.com/1424-8220/21/4/1042
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