Highly Fast Response of Pd/Ta<sub>2</sub>O<sub>5</sub>/SiC and Pd/Ta<sub>2</sub>O<sub>5</sub>/Si Schottky Diode-Based Hydrogen Sensors
Herein, the fabrication of a novel highly sensitive and fast hydrogen (H<sub>2</sub>) gas sensor, based on the Ta<sub>2</sub>O<sub>5</sub> Schottky diode, is described. First, Ta<sub>2</sub>O<sub>5</sub> thin films are deposited on silicon carbide (SiC) and silicon (Si) substrates via a radio freque...
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| Hlavní autoři: | , , , , , , , , , |
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| Médium: | Artigo |
| Jazyk: | Inglês |
| Vydáno: |
MDPI AG
2021-02-01
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| Edice: | Sensors |
| Témata: | |
| On-line přístup: | https://www.mdpi.com/1424-8220/21/4/1042 |
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