C-Axis Oriented LiNbO₃ Thin Film Grown by Chemical Beam Epitaxy for Surface Acoustic Wave Device Applications

High-frequency surface acoustic wave (SAW) devices require piezoelectric thin films combining strong electromechanical coupling, high acoustic velocity, and compatibility with scalable fabrication. Lithium niobate (LiNbO₃) is a promising material, but the growth of high-quality thin films...

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Detalhes bibliográficos

Principais autores:	Nikolay Smagin, Thanh Ngoc Kim Bui, Zakariae Oumekloul, Rahma Moalla, William Maudez, Estelle Wagner, Marc Duquennoy, Rayen Kalai Mathlouthi, Yves Deblock, Hatem Dahmani, Denis Remiens, Julien Carlier, Giacomo Benvenuti
Formato:	Artigo
Idioma:	Inglês
Publicado em:	MDPI AG 2026-05-01
coleção:	Sensors
Assuntos:	chemical beam epitaxy SAW lithium niobate thin film electromechanical coupling
Acesso em linha:	https://www.mdpi.com/1424-8220/26/9/2858
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