C-Axis Oriented LiNbO₃ Thin Film Grown by Chemical Beam Epitaxy for Surface Acoustic Wave Device Applications

High-frequency surface acoustic wave (SAW) devices require piezoelectric thin films combining strong electromechanical coupling, high acoustic velocity, and compatibility with scalable fabrication. Lithium niobate (LiNbO₃) is a promising material, but the growth of high-quality thin films...

Descripció completa

Dades bibliogràfiques

Autors principals:	Nikolay Smagin, Thanh Ngoc Kim Bui, Zakariae Oumekloul, Rahma Moalla, William Maudez, Estelle Wagner, Marc Duquennoy, Rayen Kalai Mathlouthi, Yves Deblock, Hatem Dahmani, Denis Remiens, Julien Carlier, Giacomo Benvenuti
Format:	Artigo
Idioma:	Inglês
Publicat:	MDPI AG 2026-05-01
Col·lecció:	Sensors
Matèries:	chemical beam epitaxy SAW lithium niobate thin film electromechanical coupling
Accés en línia:	https://www.mdpi.com/1424-8220/26/9/2858
Etiquetes:	Afegir etiqueta Sense etiquetes, Sigues el primer a etiquetar aquest registre!