Development of a High-Sensitivity Acoustic Sensor Based on Grating Interferometer Combined with Glass Diaphragm
In this study, based on the principle of grating interferometer-based acoustic sensors, design guidelines for the grating interferometric module were obtained and analyzed considering various factors in order to obtain high sensitivity, and a glass-based grating interference component and its acoust...
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| Main Authors: | , , , |
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| Format: | Artigo |
| Language: | Inglês |
| Published: |
MDPI AG
2024-08-01
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| Series: | Micromachines |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2072-666X/15/9/1097 |
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