Extreme Dual-Parameter Optical Fiber Sensor Composed of MgO Fabry–Perot Composite Cavities for Simultaneous Measurement of Temperature and Pressure

A single-crystal magnesium oxide (MgO) dual-Fabry–Perot (FP)-cavity sensor based on MEMS technology and laser micromachining is proposed for simultaneous measurement of temperature and pressure. The pressure sensitive cavity is processed by wet chemical etching and direct bonding, which can improve...

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Hlavní autoři:	Jia Liu, Lei Zhang, Ziyue Wang, Ruike Cao, Yunteng Dai, Pinggang Jia
Médium:	Artigo
Jazyk:	Inglês
Vydáno:	MDPI AG 2025-08-01
Edice:	Applied Sciences
Témata:	MgO fiber optic temperature pressure MEMS
On-line přístup:	https://www.mdpi.com/2076-3417/15/16/8891
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