Extreme Dual-Parameter Optical Fiber Sensor Composed of MgO Fabry–Perot Composite Cavities for Simultaneous Measurement of Temperature and Pressure
A single-crystal magnesium oxide (MgO) dual-Fabry–Perot (FP)-cavity sensor based on MEMS technology and laser micromachining is proposed for simultaneous measurement of temperature and pressure. The pressure sensitive cavity is processed by wet chemical etching and direct bonding, which can improve...
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| Glavni autori: | , , , , , |
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| Format: | Artigo |
| Jezik: | Inglês |
| Izdano: |
MDPI AG
2025-08-01
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| Serija: | Applied Sciences |
| Teme: | |
| Online pristup: | https://www.mdpi.com/2076-3417/15/16/8891 |
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