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MEMS and MOEMS Gyroscopes: A Review

Abstract Micro-gyroscopes using micro-electro-mechanical system (MEMS) and micro-opto-electro-mechanical system (MOEMS) are the new-generation and recently well-developed gyroscopes produced by the combinations of the traditional gyroscope technology and MEMS/MOEMS technologies. According to the wor...

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Principais autores: Wenyi Huang, Xing Yan, Sengyu Zhang, Zhe Li, Jamal N. A. Hassan, Dingwei Chen, Guangjun Wen, Kai Chen, Guangwei Deng, Yongjun Huang
Formato: Artigo
Idioma:Inglês
Publicado em: Tsinghua University Press 2023-10-01
coleção:Photonic Sensors
Assuntos:
Micro-gyroscope
MEMS
MOEMS
angular random walk
bias instability
Acesso em linha:https://doi.org/10.1007/s13320-023-0693-x
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