MEMS and MOEMS Gyroscopes: A Review
Abstract Micro-gyroscopes using micro-electro-mechanical system (MEMS) and micro-opto-electro-mechanical system (MOEMS) are the new-generation and recently well-developed gyroscopes produced by the combinations of the traditional gyroscope technology and MEMS/MOEMS technologies. According to the wor...
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| Autori principali: | , , , , , , , , , |
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| Natura: | Artigo |
| Lingua: | Inglês |
| Pubblicazione: |
Tsinghua University Press
2023-10-01
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| Serie: | Photonic Sensors |
| Soggetti: | |
| Accesso online: | https://doi.org/10.1007/s13320-023-0693-x |
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