Downsizing Effects on Micro and Nano Comb Drives
Downscaling has been a focal task of Electronics and Electromechanics in the last few decades, and a great engine for technological progress as well. Nevertheless, a scaling operation affects device physics, functioning and performance. The present paper investigates about the impact of scaling on a...
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| Formaat: | Artigo |
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MDPI AG
2022-02-01
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| Online toegang: | https://www.mdpi.com/2076-0825/11/3/71 |
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