Evaluation of the Piezoresistivity of a Thin Film of ZnO Doped with Fluorine and Deposited via the Ultrasonic Spray Pyrolysis Technique for Applications in Micro/Nano-Electromechanical Sensors
In this study, thin films of zinc oxide doped with fluorine ZnO: F were deposited via ultrasonic spray pyrolysis (USP) with an atomic ratio of [F/Zn] in a starting solution of 15 at.% on borosilicate glass coverslips and SiO<sub>2</sub>/Si substrates. The structure, electrical resistivity, and thick...
Wedi'i Gadw mewn:
| Prif Awduron: | , , , |
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| Fformat: | Artigo |
| Iaith: | Inglês |
| Cyhoeddwyd: |
MDPI AG
2022-11-01
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| Cyfres: | Crystals |
| Pynciau: | |
| Mynediad Ar-lein: | https://www.mdpi.com/2073-4352/12/11/1607 |
| Tagiau: |
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