Highly efficient polishing of polycrystalline CVD diamond via atmosphere inductively coupled plasma
Objectives: As a typical difficult-to-machine material, polycrystalline CVD diamond often requires sophisticated and time-consuming polishing methods to achieve a smooth surface. In this study, a non-contact polishing method based on atmospheric inductively coupled plasma is investigated for the pol...
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| Hauptverfasser: | , , , |
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| Format: | Artigo |
| Sprache: | Chinês |
| Veröffentlicht: |
Zhengzhou Research Institute for Abrasives & Grinding Co., Ltd.
2024-10-01
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| Schriftenreihe: | Jin'gangshi yu moliao moju gongcheng |
| Schlagworte: | |
| Online-Zugang: | http://www.jgszz.cn/article/doi/10.13394/j.cnki.jgszz.2023.0281 |
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