Rate-Sensing Performance of Imperfect Capacitive Ring-Based MEMS Coriolis Vibrating Gyroscopes at Large Drive Amplitudes
This paper investigates the effect of electrostatic nonlinearity on the rate-sensing performance of imperfect ring-based Coriolis Vibrating Gyroscopes (CVGs) for devices having 8 and 16 evenly distributed electrodes. Mathematical models are developed for CVGs operating in (i) an open loop for a line...
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| Autors principals: | , |
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| Format: | Artigo |
| Idioma: | Inglês |
| Publicat: |
MDPI AG
2025-04-01
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| Col·lecció: | Sensors |
| Matèries: | |
| Accés en línia: | https://www.mdpi.com/1424-8220/25/7/2263 |
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