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Polycrystalline Silicon ISFETs on Glass Substrate

The Ion Sensitive Field Effect Transistor (ISFET) operation based onpolycrystalline silicon thin film transistors is reported. These devices can be fabricated oninexpensive disposable substrates such as glass or plastics and are, therefore, promisingcandidates for low cost single-use intelligent mul...

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Principais autores: Hiroshi Maeda, Piero Migliorato, Yang Mo, Pedro Estrela, Feng Yan
Format: Artigo
Sprog:Inglês
Udgivet: MDPI AG 2005-05-01
Serier:Sensors
Fag:
polycrystalline silicon thin film transistor
Ion Sensitive Field Effect Transistor
pH sensor
penicillin
DNA
silicon nitride.
Online adgang:http://www.mdpi.com/1424-8220/5/4/293/
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