Development of Piezoelectrically Driven Quasi-Static 2D MEMS Mirrors with Extremely Large FoV for Scanning LiDARs
In this paper, a piezoelectrically driven quasi-static MEMS mirror is developed for a scanning LiDAR system. Finite element method (FEM) simulations are used to optimize the design of the MEMS scanner. With special emphasis on the shape and thickness of the actuators, they are optimized to reach a m...
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| Principais autores: | , , , , , , , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado: |
MDPI AG
2024-03-01
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| Series: | Proceedings |
| Assuntos: | |
| Acceso en liña: | https://www.mdpi.com/2504-3900/97/1/124 |
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