Investigation of Morphological, Optical, and Dielectric Properties of RF Sputtered WO<sub>x</sub> Thin Films for Optoelectronic Applications
Tungsten oxide (WO<sub>x</sub>) thin films were synthesized through the RF magnetron sputtering method by varying the sputtering power from 30 W to 80 W. Different investigations have been conducted to evaluate the variation in different morphological, optical, and dielectric properties with the spu...
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| Main Authors: | , , , , , , , , , , , , , |
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| Format: | Artigo |
| Language: | Inglês |
| Published: |
MDPI AG
2022-10-01
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| Series: | Nanomaterials |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2079-4991/12/19/3467 |
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