Design of a Shock-Protected Structure for MEMS Gyroscopes over a Full Temperature Range

Impact is the most important factor affecting the reliability of Micro-Electro-Mechanical System (MEMS) gyroscopes, therefore corresponding reliability design is very essential. This paper proposes a shock-protected structure (SPS) capable of withstanding a full temperature range from −40 °C to 80 °...

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Prif Awduron:	Yingyu Xu, Jing Lin, Chunhua He, Heng Wu, Qinwen Huang, Guizhen Yan
Fformat:	Artigo
Iaith:	Inglês
Cyhoeddwyd:	MDPI AG 2024-01-01
Cyfres:	Micromachines
Pynciau:	MEMS gyroscope shock models reliability design thermal reliability
Mynediad Ar-lein:	https://www.mdpi.com/2072-666X/15/2/206
Tagiau:	Ychwanegu Tag Dim Tagiau, Byddwch y cyntaf i dagio'r cofnod hwn!