Experimental studies and COMSOL 1-D simulation in Ar capacitively coupled plasmas
This work systematically studies a capacitively coupled plasma (CCP) source using experiments and 1-D COMSOL simulations relevant to Ar plasmas. Two radio frequency compensated Langmuir probes (LPs) and optical emission spectroscopy (OES) were purposefully used to measure the plasma parameters, and...
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| Główni autorzy: | , , , |
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| Format: | Artigo |
| Język: | Inglês |
| Wydane: |
AIP Publishing LLC
2024-01-01
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| Seria: | AIP Advances |
| Dostęp online: | http://dx.doi.org/10.1063/5.0174990 |
| Etykiety: |
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