High-Efficiency Chemical-Mechanical Magnetorheological Finishing for Ultra-Smooth Single-Crystal Silicon
To improve the material removal efficiency and surface quality of single-crystal silicon after magnetorheological finishing, a novel green chemical-mechanical magnetorheological finishing (CMMRF) fluid was developed. The main components of the CMMRF fluid are nano-Fe<sub>3</sub>O<sub>4</sub>, H<sub>...
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| Autores principales: | , , , , |
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| Formato: | Artigo |
| Lenguaje: | Inglês |
| Publicado: |
MDPI AG
2023-01-01
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| Colección: | Nanomaterials |
| Materias: | |
| Acceso en línea: | https://www.mdpi.com/2079-4991/13/3/398 |
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