High-Efficiency Chemical-Mechanical Magnetorheological Finishing for Ultra-Smooth Single-Crystal Silicon

To improve the material removal efficiency and surface quality of single-crystal silicon after magnetorheological finishing, a novel green chemical-mechanical magnetorheological finishing (CMMRF) fluid was developed. The main components of the CMMRF fluid are nano-Fe₃O₄, H<sub>...

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Hlavní autoři:	Zhifan Lin, Hao Hu, Yifan Dai, Yaoyu Zhong, Shuai Xue
Médium:	Artigo
Jazyk:	Inglês
Vydáno:	MDPI AG 2023-01-01
Edice:	Nanomaterials
Témata:	single-crystal silicon chemical-mechanical magnetorheological finishing ultra-smooth surface magnetorheological finishing fluid
On-line přístup:	https://www.mdpi.com/2079-4991/13/3/398
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