Enhancing Sensitivity of Piezoresistive Pressure Sensor at Low Pressures Using Photo‐Sensitive Resin Plate as Flexible Substrate
Abstract In this paper, flexible highly sensitive piezoresistive pressure sensors for low compressive stress detection (9.8 Pa to 10.7 kPa) are proposed, by using Photo‐Sensitive Resin Plate (PSRP). The photolithography method is employed to create the micro‐dome structure pattern on PSRP. Finally,...
Furkejuvvon:
| Váldodahkkit: | , |
|---|---|
| Materiálatiipa: | Artigo |
| Giella: | Inglês |
| Almmustuhtton: |
Wiley-VCH
2025-02-01
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| Ráidu: | Macromolecular Materials and Engineering |
| Fáttát: | |
| Liŋkkat: | https://doi.org/10.1002/mame.202400237 |
| Fáddágilkorat: |
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