Enhancing Sensitivity of Piezoresistive Pressure Sensor at Low Pressures Using Photo‐Sensitive Resin Plate as Flexible Substrate
Abstract In this paper, flexible highly sensitive piezoresistive pressure sensors for low compressive stress detection (9.8 Pa to 10.7 kPa) are proposed, by using Photo‐Sensitive Resin Plate (PSRP). The photolithography method is employed to create the micro‐dome structure pattern on PSRP. Finally,...
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| 主要な著者: | , |
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| フォーマット: | Artigo |
| 言語: | Inglês |
| 出版事項: |
Wiley-VCH
2025-02-01
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| シリーズ: | Macromolecular Materials and Engineering |
| 主題: | |
| オンライン･アクセス: | https://doi.org/10.1002/mame.202400237 |
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