Fabrication of ZnO Nanorods on MEMS Piezoresistive Silicon Microcantilevers for Environmental Monitoring

In this study, a ZnO nanorods (NRs) patterned MEMS piezoresistive silicon micro-cantilever was fabricated as environmental monitor. The fabrication starts from bulk silicon, utilizing photolithography, diffusion, inductively coupled plasma (ICP) cryogenic dry etching, Zinc DC-sputtering, and chemica...

Ausführliche Beschreibung

Bibliografische Detailangaben

Hauptverfasser:	Jiushuai Xu, Maik Bertke, Alaaeldin Gad, Feng Yu, Gerry Hamdana, Andrey Bakin, Erwin Peiner
Format:	Artigo
Sprache:	Inglês
Veröffentlicht:	MDPI AG 2017-08-01
Schriftenreihe:	Proceedings
Schlagworte:	MEMS Micro-cantilever ZnO nanorods seed layer environmental sensor
Online-Zugang:	https://www.mdpi.com/2504-3900/1/4/290
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