Evaluation of Potential Occupational Exposure and Release of Nanoparticles in Semiconductor-Manufacturing Environments

Occupational exposure to airborne nanoparticles in semiconductor-manufacturing facilities is of growing concern. Currently, comprehensive information regarding atmospheric concentrations, potential origins, and the physical and chemical properties of nanoparticles in these industrial settings is lac...

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Auteurs principaux:	Zhaobo Zhang, Paul Westerhoff, Pierre Herckes
Format:	Artigo
Langue:	Inglês
Publié:	MDPI AG 2024-02-01
Collection:	Atmosphere
Sujets:	semiconductor-manufacturing environment nanoparticle exposure personal sampling scanning mobility particle sizer particle size distribution
Accès en ligne:	https://www.mdpi.com/2073-4433/15/3/301
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