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Evaluation of Potential Occupational Exposure and Release of Nanoparticles in Semiconductor-Manufacturing Environments

Occupational exposure to airborne nanoparticles in semiconductor-manufacturing facilities is of growing concern. Currently, comprehensive information regarding atmospheric concentrations, potential origins, and the physical and chemical properties of nanoparticles in these industrial settings is lac...

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Principais autores: Zhaobo Zhang, Paul Westerhoff, Pierre Herckes
Format: Artigo
Sprog:Inglês
Udgivet: MDPI AG 2024-02-01
Serier:Atmosphere
Fag:
semiconductor-manufacturing environment
nanoparticle exposure
personal sampling
scanning mobility particle sizer
particle size distribution
Online adgang:https://www.mdpi.com/2073-4433/15/3/301
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