Low-loss slot waveguides with silicon (111) surfaces realized using anisotropic wet etching

We demonstrate low-loss slot waveguides on silicon-on-insulator (SOI) platform. Waveguides oriented along the (11-2) direction on the Si (110) plane were first fabricated by a standard e-beam lithography and dry etching process. A TMAH based anisotropic wet etching technique was then used to remove...

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Prif Awduron:	Kapil Debnath, Ali Z Khokhar, Stuart A Boden, Hideo Arimoto, Swe Zin Oo, Harold M H Chong, Graham Trevor Reed, Shinichi Saito
Fformat:	Artigo
Iaith:	Inglês
Cyhoeddwyd:	Frontiers Media S.A. 2016-11-01
Cyfres:	Frontiers in Materials
Pynciau:	silicon photonics integrated photonics Waveguide Slot waveguide Anisotropic wet etching
Mynediad Ar-lein:	http://journal.frontiersin.org/Journal/10.3389/fmats.2016.00051/full
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