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High Temperature Magnetic Cores Based on PowderMEMS Technique for Integrated Inductors with Active Cooling

The paper presents the realization and characterization of micro-inductors with core with active cooling capability for future integrated DC/DC converter solutions operating with wide bandgap semiconductors at high temperatures with high power densities. The cores are fabricated backend-of-line comp...

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Bibliografische gegevens
Hoofdauteurs: Malte Paesler, Thomas Lisec, Holger Kapels
Formaat: Artigo
Taal:Inglês
Gepubliceerd in: MDPI AG 2022-02-01
Reeks:Micromachines
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Online toegang:https://www.mdpi.com/2072-666X/13/3/347
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