PowderMEMS—A Generic Microfabrication Technology for Integrated Three-Dimensional Functional Microstructures

A comprehensive overview of PowderMEMS—a novel back-end-of-line-compatible microfabrication technology—is presented in this paper. The PowderMEMS process solidifies micron-sized particles via atomic layer deposition (ALD) to create three-dimensional microstructures on planar substrates from a wide v...

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Principais autores:	Thomas Lisec, Ole Behrmann, Björn Gojdka
Formato:	Artigo
Idioma:	Inglês
Publicado em:	MDPI AG 2022-02-01
Colecção:	Micromachines
Assuntos:	MEMS integration three-dimensional microstructures powder-based microstructures porous MEMS micromagnets microfluidics
Acesso em linha:	https://www.mdpi.com/2072-666X/13/3/398
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