Editorial for the Special Issue on MEMS/NEMS Devices and Applications, 3rd Edition
Microelectromechanical systems (MEMS) and nanoelectromechanical systems (NEMS) have experienced rapid and sustained development in recent years and have become key enabling technologies for intelligent sensing [...]
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| Hauptverfasser: | , , |
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| Format: | Artigo |
| Sprache: | Inglês |
| Veröffentlicht: |
MDPI AG
2026-02-01
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| Schriftenreihe: | Micromachines |
| Schlagworte: | |
| Online-Zugang: | https://www.mdpi.com/2072-666X/17/2/205 |
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