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Complex illumination system for fast interferometric measurements

Freeform metrology is an enabling technology for today’s research and advanced manufacturing. The Tilted Wave Interferometer is a full field measurement system for fast and flexible measurements. It is based on an off-axis illumination scheme based on a microlens array. In this contribution, we pres...

Whakaahuatanga katoa

I tiakina i:
Ngā taipitopito rārangi puna kōrero
Ngā kaituhi matua: Schober Christian, Lausmann Lisa, Treptow Kevin, Pruss Christof, Reichelt Stephan
Hōputu: Artigo
Reo:Inglês
I whakaputaina: EDP Sciences 2023-01-01
Rangatū:EPJ Web of Conferences
Urunga tuihono:https://www.epj-conferences.org/articles/epjconf/pdf/2023/13/epjconf_eosam2023_02002.pdf
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