Complex illumination system for fast interferometric measurements
Freeform metrology is an enabling technology for today’s research and advanced manufacturing. The Tilted Wave Interferometer is a full field measurement system for fast and flexible measurements. It is based on an off-axis illumination scheme based on a microlens array. In this contribution, we pres...
Guardado en:
| Autores principales: | , , , , |
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| Formato: | Artigo |
| Lenguaje: | Inglês |
| Publicado: |
EDP Sciences
2023-01-01
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| Colección: | EPJ Web of Conferences |
| Acceso en línea: | https://www.epj-conferences.org/articles/epjconf/pdf/2023/13/epjconf_eosam2023_02002.pdf |
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