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Controllable Fabrication of Non-Close-Packed Colloidal Nanoparticle Arrays by Ion Beam Etching

Abstract Polystyrene (PS) nanoparticle films with non-close-packed arrays were prepared by using ion beam etching technology. The effects of etching time, beam current, and voltage on the size reduction of PS particles were well investigated. A slow etching rate, about 9.2 nm/min, is obtained for th...

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Principais autores: Jie Yang, Mingling Zhang, Xu Lan, Xiaokang Weng, Qijiang Shu, Rongfei Wang, Feng Qiu, Chong Wang, Yu Yang
Format: Artigo
Sprog:Inglês
Udgivet: SpringerOpen 2018-06-01
Serier:Nanoscale Research Letters
Fag:
Ion beam etching
Polystyrene nanoparticles
Nanosphere lithography
Si nanopillar arrays
Online adgang:http://link.springer.com/article/10.1186/s11671-018-2586-2
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