DFT Study on the Gas-Phase Cluster Formation Mechanism in SiC CVD
This study employs density functional theory and quantum chemical calculations to investigate the gas-phase nucleation and growth mechanisms during chemical vapor deposition of silicon carbide. Based on thermodynamic stability evaluations of large clusters under various configurations, the lowest-en...
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| Principais autores: | , , , , |
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| Format: | Artigo |
| Sprog: | Inglês |
| Udgivet: |
MDPI AG
2026-08-01
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| Serier: | Crystals |
| Fag: | |
| Online adgang: | https://www.mdpi.com/2073-4352/16/8/504 |
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