Highly sensitive silicon nitride biomedical sensor using plasmonic grating and ZnO layer
A biomedical sensor that sense concentration of glycerol in a deionized water with a high sensitivity is introduced in this work. A silicon nitride layer is added to the grated substrate, glass, then a plasmonic layer has been used before adding a zinc oxide layer on the top of the plasmonic grating...
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| Hlavní autor: | |
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| Médium: | Artigo |
| Jazyk: | Inglês |
| Vydáno: |
IOP Publishing
2020-01-01
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| Edice: | Materials Research Express |
| Témata: | |
| On-line přístup: | https://doi.org/10.1088/2053-1591/ab9ee0 |
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