Performance Optimization of FD-SOI Hall Sensors Via 3D TCAD Simulations
This work investigates the behavior of fully depleted silicon-on-insulator (FD-SOI) Hall sensors with an emphasis on their physical parameters, namely the aspect ratio, doping concentration, and thicknesses. Via 3D-technology computer aided design (TCAD) simulations with a galvanomagnetic transport...
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| Главные авторы: | , , , , |
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| Формат: | Artigo |
| Язык: | Inglês |
| Опубликовано: |
MDPI AG
2020-05-01
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| Серии: | Sensors |
| Предметы: | |
| Online-ссылка: | https://www.mdpi.com/1424-8220/20/10/2751 |
| Метки: |
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