Performance of thermal field-assisted precision lapping for single crystal sapphire wafers
To address the issues of poor surface quality and low efficiency in conventional sapphire wafer lapping processing, a thermal field-assisted processing technology was proposed. The influence of thermal field-assistance on sapphire wafer lapping performance was investigated. While controlling the tem...
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| Principais autores: | , , , , , |
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| Format: | Artigo |
| Jezik: | Chinês |
| Izdano: |
Zhengzhou Research Institute for Abrasives & Grinding Co., Ltd.
2023-10-01
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| Serija: | Jin'gangshi yu moliao moju gongcheng |
| Teme: | |
| Online dostop: | http://www.jgszz.cn/article/doi/10.13394/j.cnki.jgszz.2022.0203 |
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