Titanium Dioxide Nanoparticle Humidity Microsensors Integrated with Circuitry on-a-Chip

A humidity microsensor integrated with a readout circuit on-a-chip fabricated using the commercial 0.18 μm CMOS (complementary metal oxide semiconductor) process was presented. The integrated sensor chip consists of a humidity sensor and a readout circuit. The humidity sensor is composed of a sensit...

Ausführliche Beschreibung

Bibliografische Detailangaben

Hauptverfasser:	Yu-Chih Hu, Ching-Liang Dai, Cheng-Chih Hsu
Format:	Artigo
Sprache:	Inglês
Veröffentlicht:	MDPI AG 2014-03-01
Schriftenreihe:	Sensors
Schlagworte:	integrtaed humidity microsensor titanium dioxide readout circuit
Online-Zugang:	http://www.mdpi.com/1424-8220/14/3/4177
Tags:	Tag hinzufügen Keine Tags, Fügen Sie das erste Tag hinzu!