Titanium Dioxide Nanoparticle Humidity Microsensors Integrated with Circuitry on-a-Chip
A humidity microsensor integrated with a readout circuit on-a-chip fabricated using the commercial 0.18 μm CMOS (complementary metal oxide semiconductor) process was presented. The integrated sensor chip consists of a humidity sensor and a readout circuit. The humidity sensor is composed of a sensit...
Guardat en:
| Autors principals: | , , |
|---|---|
| Format: | Artigo |
| Idioma: | Inglês |
| Publicat: |
MDPI AG
2014-03-01
|
| Col·lecció: | Sensors |
| Matèries: | |
| Accés en línia: | http://www.mdpi.com/1424-8220/14/3/4177 |
| Etiquetes: |
Sense etiquetes, Sigues el primer a etiquetar aquest registre!
|